JPS6224941U - - Google Patents
Info
- Publication number
- JPS6224941U JPS6224941U JP11645785U JP11645785U JPS6224941U JP S6224941 U JPS6224941 U JP S6224941U JP 11645785 U JP11645785 U JP 11645785U JP 11645785 U JP11645785 U JP 11645785U JP S6224941 U JPS6224941 U JP S6224941U
- Authority
- JP
- Japan
- Prior art keywords
- plasma generation
- pipe
- activated gas
- microwave
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11645785U JPS6224941U (en]) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11645785U JPS6224941U (en]) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6224941U true JPS6224941U (en]) | 1987-02-16 |
Family
ID=31001063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11645785U Pending JPS6224941U (en]) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6224941U (en]) |
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1985
- 1985-07-31 JP JP11645785U patent/JPS6224941U/ja active Pending